EFFECT OF BRIGHTENER CONCENTRATION ON THE THERMAL DISTORTION OF GOLD PLATED X-RAY MASKS

被引：3

作者：

DAUKSHER, WJ

RESNICK, DJ

SEESE, PA

CUMMINGS, KD

YANOF, AW

JOHNSON, WA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587416

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3990 / 3994

页数：5

共 11 条

[1] ANNEALING BEHAVIOR OF GOLD ABSORBER IN X-RAY MASKS
ACOSTA, RE
JOHNSON, WA
BERRY, BS
PRITCHET, WC
[J]. MICROELECTRONIC ENGINEERING, 1992, 17 (1-4) : 189 - 192
[2] ACOSTA RE, 1993, MATER RES SOC SYMP P, V306, P265, DOI 10.1557/PROC-306-265
[3] A NEW OPERATING REGIME FOR ELECTROPLATING THE GOLD ABSORBER ON X-RAY MASKS
DAUKSHER, WJ
RESNICK, DJ
JOHNSON, WA
YANOF, AW
[J]. MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 235 - 238
[4] STRESS REDUCTION OF GOLD ABSORBER PATTERNS ON X-RAY MASKS
JOHNSON, WA
ACOSTA, RE
BERRY, BS
PRITCHET, WC
RESNICK, DJ
DAUKSHER, WJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 3155 - 3158
[5] EFFECT OF THERMAL-TREATMENT ON THE MECHANICAL AND STRUCTURAL-PROPERTIES OF GOLD THIN-FILMS
MALEK, CK
KEBABI, B
CHARAI, A
DELAHOUSSAYE, P
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3329 - 3332
[6] FABRICATION AND CHARACTERIZATION OF HIGH-FLATNESS MESA-ETCHED SILICON-NITRIDE X-RAY MASKS
MOEL, A
CHU, W
EARLY, K
KU, YC
MOON, EE
TSAI, F
SMITH, HI
SCHATTENBURG, ML
FUNG, CD
GRIFFITH, FW
HAAS, LE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3287 - 3291
[7] X-RAY MASK PROCESS-INDUCED DISTORTION STUDY
NASH, SC
FAURE, TB
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3324 - 3328
[8] SEESE PA, 1993, P SOC PHOTO-OPT INS, V1924, P457, DOI 10.1117/12.146527
[9] TEMPERATURE-DEPENDENCE OF STRESSES IN ALUMINUM FILMS ON OXIDIZED SILICON SUBSTRATES
SINHA, AK
SHENG, TT
[J]. THIN SOLID FILMS, 1978, 48 (01) : 117 - 126
[10] LOW-TEMPERATURE REACTIVE ION ETCHING AND MICROWAVE PLASMA-ETCHING OF SILICON
TACHI, S
TSUJIMOTO, K
OKUDAIRA, S
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (08) : 616 - 618

← 1 2 →