TEMPERATURE-DEPENDENCE OF STRESSES IN ALUMINUM FILMS ON OXIDIZED SILICON SUBSTRATES

被引：103

作者：

SINHA, AK

SHENG, TT

机构：

来源：

THIN SOLID FILMS | 1978年 / 48卷 / 01期

关键词：

D O I：

10.1016/0040-6090(78)90337-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：117 / 126

页数：10

共 17 条

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