STRUCTURE OF ROD DEFECTS IN BORON-IMPLANTED SILICON

被引:18
作者
LAMBERT, JA
DOBSON, PS
机构
来源
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1978年 / 37卷 / 04期
关键词
D O I
10.1080/01418617808239180
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:441 / 446
页数:6
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