SYNTHESIS OF SUPERHARD CARBON NITRIDE COMPOSITE COATINGS

被引：148

作者：

LI, D ^{[1
]}

CHU, X ^{[1
]}

CHENG, SC ^{[1
]}

LIN, XW ^{[1
]}

DRAVID, VP ^{[1
]}

CHUNG, YW ^{[1
]}

WONG, MS ^{[1
]}

SPROUL, WD ^{[1
]}

机构：

[1] NORTHWESTERN UNIV, BIRL IND RES LAB, EVANSTON, IL 60201 USA

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 02期

关键词：

D O I：

10.1063/1.114667

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Crystalline carbon nitride/TiN composite coatings have been deposited using a dual-cathode magnetron sputtering system onto polished silicon and M2 steel substrates held at room temperature. We propose that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites. The resulting coatings are smooth, fully crystalline, with nanoindentation hardness in the range of 45-55 GPa. This hardness is in the low-end range of diamond films. Suggestions for better seeding materials to further improve the hardness are proposed.© 1995 American Institute of Physics.

引用

页码：203 / 205

页数：3

共 22 条

[1] Barnett S. A., 1993, PHYS THIN FILMS, V17, P1
[2] DEPOSITION AND PROPERTIES OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS
CHU, X
WONG, MS
SPROUL, WD
ROHDE, SL
BARNETT, SA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 1604 - 1609
[3] REACTIVE UNBALANCED MAGNETRON SPUTTER DEPOSITION OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS
CHU, X
BARNETT, SA
WONG, MS
SPROUL, WD
[J]. SURFACE & COATINGS TECHNOLOGY, 1993, 57 (01) : 13 - 18
[4] PROPERTIES OF CARBON NITRIDE THIN-FILMS PREPARED BY ION AND VAPOR-DEPOSITION
CHUBACI, JFD
SAKAI, T
YAMAMOTO, T
OGATA, K
EBE, A
FUJIMOTO, F
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 463 - 466
[5] REACTIVE SPUTTERING OF CARBON AND CARBIDE TARGETS IN NITROGEN
CUOMO, JJ
LEARY, PA
YU, D
REUTER, W
FRISCH, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 299 - 302
[6] FORMATION OF CARBON NITRIDE FILMS BY MEANS OF ION ASSISTED DYNAMIC MIXING (IVD) METHOD
FUJIMOTO, F
OGATA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (3B): : L420 - L423
[7] HALLEN EE, 1992, Patent No. 005110679
[8] COMPOSITION, STRUCTURE AND TRIBOLOGICAL PROPERTIES OF AMORPHOUS-CARBON NITRIDE COATINGS
LI, D
CUTIONGCO, E
CHUNG, YW
WONG, MS
SPROUL, WD
[J]. SURFACE & COATINGS TECHNOLOGY, 1994, 68 : 611 - 615
[9] NANO-INDENTATION STUDIES OF ULTRAHIGH STRENGTH CARBON NITRIDE THIN-FILMS
LI, D
CHUNG, YW
WONG, MS
SPROUL, WD
[J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (01) : 219 - 223
[10] LIN TS, 1987, MATER RES SOC S P, V77, P247

← 1 2 3 →