GROWTH OF ALSB ON INSULATING SUBSTRATES BY METAL ORGANICS CHEMICAL VAPOR-DEPOSITION

被引:46
作者
LEROUX, M [1 ]
TROMSONCARLI, A [1 ]
GIBART, P [1 ]
VERIE, C [1 ]
BERNARD, C [1 ]
SCHOULER, MC [1 ]
机构
[1] ECOLE NATL SUPER ELECTROCHIM & ELECTROMET GRENOBLE,CTR THERMODYNAM CHIM MINERALE,F-38401 ST MARTIN HERES,FRANCE
关键词
D O I
10.1016/0022-0248(80)90031-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:367 / 378
页数:12
相关论文
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