GROWTH AND PROPERTIES OF VACUUM-DEPOSITED FILMS OF ALSB, ALAS AND ALP

被引:17
作者
FRANCOMBE, MH
NOREIKA, AJ
ZEITMAN, SA
JOHNSON, JE
机构
[1] WESTINGHOUSE RES LABS,PITTSBURGH,PA 15235
[2] WESTINGHOUSE ELECT CO,SEMICONDUCTOR DIV,YOUNGWOOD,PA 15697
关键词
D O I
10.1016/0040-6090(76)90309-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:259 / 262
页数:4
相关论文
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