PROPERTIES OF DIAMOND-LIKE CARBON-FILM AND ITS APPLICATION AS A PROTECTIVE LAYER IN THIN-FILM MAGNETIC RECORDING DISKS

被引：14

作者：

KOKAKU, Y

MATSUMOTO, H

INABA, H

FUJIMAKI, S

KITOH, M

ABE, K

机构：

[1] Production Engineering Research Lab., Hitachi Ltd., 292 Yoshida-cho, Totsuka-ku

[2] Data Storage and Retrieval Division, Hitachi Ltd., 2880

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期

关键词：

D O I：

10.1109/20.281350

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Wear rate of diamond-like carbon (DLC) protective layer deposited by a radio frequency plasma enhanced chemical vapor deposition method has been evaluated by continuous sliding tests using spherical sapphire pins. The influences of each property such as microstructure and microhardness on wear durability of the film have been discussed. It has been found that the wear durability. of the DLC film is several times superior to that of conventional sputtered carbon film.

引用

页码：3942 / 3944

页数：3

共 5 条

[1] FRICTIONAL-PROPERTIES OF DIAMOND-LIKE CARBON LAYERS [J].