THE INFLUENCE OF ARGON ION-BOMBARDMENT ON THE ELECTRICAL AND OPTICAL-PROPERTIES OF CLEAN SILICON SURFACES

被引：13

作者：

MARTENS, JWD

VANDENBOGERT, WF

VANSILFHOUT, A

机构：

来源：

SURFACE SCIENCE | 1981年 / 105卷 / 01期

关键词：

D O I：

10.1016/0039-6028(81)90161-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：275 / 288

页数：14

相关论文

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