TIN COATINGS ON M2 STEEL PRODUCED BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION

被引：24

作者：

HILTON, MR

VANDENTOP, GJ

SALMERON, M

SOMORJAI, GA

机构：

[1] UNIV CALIF BERKELEY,DEPT MAT SCI & MIN ENGN,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,DEPT CHEM,BERKELEY,CA 94720

来源：

THIN SOLID FILMS | 1987年 / 154卷 / 1-2期

关键词：

This work was supported by the Director; Office of Energy Research; O ffice of Basic Sciences; M aterials Science Division; of the U.S. Department of Energy under Contract DE-AC03-76FOOO98. The authors would like to thank Professor R. Andersen and N. Rutherford for synthesizing the organometallic compound;

D O I：

10.1016/0040-6090(87)90380-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：377 / 386

页数：10

共 17 条

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