Solid-State Lithium Microbatteries

被引:45
作者
Julien, C. [1 ]
Yebka, B. [1 ]
Guesdon, J. P. [1 ]
机构
[1] Univ Paris 06, Phys Solides Lab, F-75252 Paris 05, France
关键词
D O I
10.1007/BF02390214
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Batteries of the size of microelectronic devices, less than 10 mu m thick, are now being developed and built, using thin-film deposition technologies, i.e., flash-evaporation, rf-sputtering and sol-gel technique, that are compatible with integrated circuits. Their use in future microdevices, microsensors, intergrated circuits, memories and very large-scale integration are envisaged. Advances have been made particularly in the engineering of lithium/amorphous inorganic electrolyte/layered compound cells. Physics of the solid-state microbatteries are reviewed and the latest advances presented. The adequacy and efficiency of materials is examined. New optimized lithium microbatteries including transition-metal oxides as intercalation cathodes, i.e., MoO(3), V(2)O(5), and V(6)O(13) films are presented and their advantages are discussed in detail.
引用
收藏
页码:316 / 327
页数:12
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