STRUCTURAL CHARACTERIZATION OF SYNTHESIZED MOLYBDENUM DITELLURIDE THIN-FILMS

被引:11
作者
BERNEDE, JC
POUZET, J
MANAI, N
BENMOUAIS, A
机构
[1] Laboratoire de Physique des Matériaux et Composants de l'Electronique, Faculté des Sciences, des Techniques Université de Nantes, 44072 Nantes Cédex 03
关键词
13;
D O I
10.1016/0025-5408(90)90159-Y
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A technique to obtain MoTe2 thin films is described MoTe2 layers synthesized by annealing a molybdenum foil under tellurium pressure, have been investigated by X-ray analysis, electron spectroscopy (XPS), electron microprobe analysis and scanning electron microscopy. It has been found that the films are stoichiometric and crystallize in the hexagonal structure. The c axis orientation is essentially perpendicular to the plane of the molybdenum substrate. The binding energies deduced from the XPS lines were found to be in good agreement with the single crystal reference. Thin films and single crystal electron spectroscopy depth profiling studies gave identical results. © 1990.
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页码:31 / 42
页数:12
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