OPTIMIZATION OF A MOSE2 THIN-FILM DEPOSITION TECHNIQUE

被引:19
作者
BERNEDE, JC
MALLOUKY, A
POUZET, J
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D O I
10.1016/0254-0584(88)90061-2
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:201 / 214
页数:14
相关论文
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