MEASUREMENT OF CHEMICAL SPUTTERING YIELDS OF VARIOUS TYPES OF CARBON

被引:73
作者
YAMADA, R
NAKAMURA, K
SONE, K
SAIDOH, M
机构
关键词
D O I
10.1016/0022-3115(80)90369-4
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:278 / 284
页数:7
相关论文
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