FLATTENED DIAMOND CRYSTALS SYNTHESIZED BY MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION IN A CO-H-2 SYSTEM

被引：7

作者：

HIRABAYASHI, K ^{[1
]}

MATSUMOTO, S ^{[1
]}

机构：

[1] NATL INST RES INORGAN MAT,TSUKUBA,IBARAKI 305,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 75卷 / 02期

关键词：

D O I：

10.1063/1.356500

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Flattened diamond crystals have been synthesized by microwave plasma chemical vapor deposition method in a CO-H-2 system. The flattened diamond crystals are formed by, a re-entrant corner effect, which resulted from formation of the twin boundaries. The flattened diamond crystals grow with {111} oriented surface, but do not grow epitaxially on the Si{111} substrate, probably because the source gas includes oxygen-containing gas (CO gas) and the substrate temperature is comparatively low.

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页码：1151 / 1154

页数：4

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