PROPOSED EXPERIMENT TO MEASURE SURFACE-ROUGHNESS IN SI/SIO2 SYSTEM

[1] ROLE OF SCATTERING BY SURFACE-ROUGHNESS IN SILICON INVERSION LAYERS [J]. SURFACE SCIENCE, 1973, 34 (03) : 717 - 731

[2] CHENG YC, 1971, 3 P C SOL STAT DEV T

[3] CHENG YC, 1972, J JAPAN SOC APPL PHY, V41, P173

[4] CHENG YC, TO BE PUBLISHED

[5] GREEN RF, 1969, MOLECULAR PROCESSES

[6] MODE CONVERSION CAUSED BY SURFACE IMPERFECTIONS OF A DIELECTRIC SLAB WAVEGUIDE [J]. BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10): : 3187 - +

[7] MODE CONVERSION CAUSED BY DIAMETER CHANGES OF A ROUND DIELECTRIC WAVEGUIDE [J]. BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10): : 3217 - +

[8] NEUBERGER MS, 1971, HDB ELECTRONIC MATER, V5

[9] STERN F, 1970, 10 P INT C PHYS SEM, P451

[10] LIGHT WAVES IN THIN FILMS AND INTEGRATED OPTICS [J]. APPLIED OPTICS, 1971, 10 (11): : 2395 - &

[1] ROLE OF SCATTERING BY SURFACE-ROUGHNESS IN SILICON INVERSION LAYERS [J]. SURFACE SCIENCE, 1973, 34 (03) : 717 - 731

[2] CHENG YC, 1971, 3 P C SOL STAT DEV T

[3] CHENG YC, 1972, J JAPAN SOC APPL PHY, V41, P173

[4] CHENG YC, TO BE PUBLISHED

[5] GREEN RF, 1969, MOLECULAR PROCESSES

[6] MODE CONVERSION CAUSED BY SURFACE IMPERFECTIONS OF A DIELECTRIC SLAB WAVEGUIDE [J]. BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10): : 3187 - +

[7] MODE CONVERSION CAUSED BY DIAMETER CHANGES OF A ROUND DIELECTRIC WAVEGUIDE [J]. BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10): : 3217 - +

[8] NEUBERGER MS, 1971, HDB ELECTRONIC MATER, V5

[9] STERN F, 1970, 10 P INT C PHYS SEM, P451

[10] LIGHT WAVES IN THIN FILMS AND INTEGRATED OPTICS [J]. APPLIED OPTICS, 1971, 10 (11): : 2395 - &