ROLE OF SCATTERING BY SURFACE-ROUGHNESS IN SILICON INVERSION LAYERS

被引：137

作者：

CHENG, YC ^{[1
]}

SULLIVAN, EA ^{[1
]}

机构：

[1] BELL NO RES,STN C,OTTAWA,ONTARIO,CANADA

来源：

SURFACE SCIENCE | 1973年 / 34卷 / 03期

关键词：

D O I：

10.1016/0039-6028(73)90038-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：717 / 731

页数：15

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