REDUCTION IN THE SIZE OF FEATURES OF PATTERNED SAMS GENERATED BY MICROCONTACT PRINTING WITH MECHANICAL COMPRESSION OF THE STAMP

被引：72

作者：

XIA, YN ^{[1
]}

WHITESIDES, GM ^{[1
]}

机构：

[1] HARVARD UNIV,DEPT CHEM,CAMBRIDGE,MA 02138

来源：

ADVANCED MATERIALS | 1995年 / 7卷 / 05期

关键词：

D O I：

10.1002/adma.19950070513

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Sub-micron size features can now be produced using the microcontact printing technique. The elastomeric stamp used to produce the features in self-assembled monolayers (see figure) is mechanically compressed both one- and two-dimensionally, resulting in a reduction of the size of the features by up to a factor of almost ten (e.g. 2.5 mu m to 0.2 mu m) while retaining the spatial regularities in the pattern.

引用

页码：471 / 473

页数：3

共 10 条

[1] SYNTHESIS, STRUCTURE, AND PROPERTIES OF MODEL ORGANIC-SURFACES
DUBOIS, LH
NUZZO, RG
[J]. ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1992, 43 : 437 - 463
[2] DUNN PN, 1994, SOLID STATE TECH JUN, P49
[3] THE USE OF SELF-ASSEMBLED MONOLAYERS AND A SELECTIVE ETCH TO GENERATE PATTERNED GOLD FEATURES
KUMAR, A
BIEBUYCK, HA
ABBOTT, NL
WHITESIDES, GM
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1992, 114 (23) : 9188 - 9189
[4] PATTERNING SELF-ASSEMBLED MONOLAYERS - APPLICATIONS IN MATERIALS SCIENCE
KUMAR, A
BIEBUYCK, HA
WHITESIDES, GM
[J]. LANGMUIR, 1994, 10 (05) : 1498 - 1511
[5] FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING
KUMAR, A
WHITESIDES, GM
[J]. APPLIED PHYSICS LETTERS, 1993, 63 (14) : 2002 - 2004
[6] Moreau W. M., 1988, SEMICONDUCTOR LITHOG, V1st
[7] WET CHEMICAL APPROACHES TO THE CHARACTERIZATION OF ORGANIC-SURFACES - SELF-ASSEMBLED MONOLAYERS, WETTING, AND THE PHYSICAL ORGANIC-CHEMISTRY OF THE SOLID LIQUID INTERFACE
WHITESIDES, GM
LAIBINIS, PE
[J]. LANGMUIR, 1990, 6 (01) : 87 - 96
[8] MICROFABRICATION BY MICROCONTACT PRINTING OF SELF-ASSEMBLED MONOLAYERS
WILBUR, JL
KUMAR, A
KIM, E
WHITESIDES, GM
[J]. ADVANCED MATERIALS, 1994, 6 (7-8) : 600 - 604
[9] XIA Y, IN PRESS J AM CHEM S
[10] XIA Y, UNPUB

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