MICROFABRICATION BY MICROCONTACT PRINTING OF SELF-ASSEMBLED MONOLAYERS

被引：428

作者：

WILBUR, JL

KUMAR, A

KIM, E

WHITESIDES, GM

机构：

[1] Department of Chemistry, Harvard University, Cambridge, Massachusetts, 02138

来源：

ADVANCED MATERIALS | 1994年 / 6卷 / 7-8期

关键词：

D O I：

10.1002/adma.19940060719

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Microcontact printing, is described. It offers extreme experimental simplicity and flexibility, relying on the ability of self-assembled monolayers (SAMs) of long-chain alkanethiolates on gold and other metals to act as nanometer resists. The Figure is an electron micrograph of a silicon microstructure resulting from chemical etching of a patterned SAM.

引用

页码：600 / 604

页数：5

共 32 条

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