X-RAY ANALYSIS OF SPUTTERED FILMS OF BETA-TANTALUM AND BODY-CENTERED CUBIC TANTALUM

被引：95

作者：

READ, MH

HENSLER, DH

机构：

来源：

THIN SOLID FILMS | 1972年 / 10卷 / 01期

关键词：

D O I：

10.1016/0040-6090(72)90277-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：123 / &

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