KINETIC-ANALYSIS OF HYDROGEN EVOLUTION FROM REACTIVELY SPUTTERED AMORPHOUS SILICON-HYDROGEN ALLOYS

被引：44

作者：

OGUZ, S

PAESLER, MA

机构：

来源：

PHYSICAL REVIEW B | 1980年 / 22卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.22.6213

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：6213 / 6221

页数：9

共 26 条

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[9] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON
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