QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON

被引:270
作者
BRODSKY, MH
FRISCH, MA
ZIEGLER, JF
LANFORD, WA
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
[2] YALE UNIV,WRIGHT NUCL STRUCT LAB,NEW HAVEN,CT 06520
关键词
D O I
10.1063/1.89260
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:561 / 563
页数:3
相关论文
共 10 条
  • [1] DEPOSITION OF AMORPHOUS SILICON FILMS FROM GLOW-DISCHARGE PLASMAS OF SILANE
    BRODSKY, MH
    [J]. THIN SOLID FILMS, 1977, 40 (JAN) : L23 - L25
  • [2] BRODSKY MH, UNPUBLISHED
  • [3] USE OF HYDROGENATION IN STRUCTURAL AND ELECTRONIC STUDIES OF GAP STATES IN AMORPHOUS-GERMANIUM
    CONNELL, GAN
    PAWLIK, JR
    [J]. PHYSICAL REVIEW B, 1976, 13 (02): : 787 - 804
  • [4] FRISCH MA, 1975, 23RD P ANN C MASS SP, P561
  • [5] KNIGHTS JC, 1976, AIP C P, V31, P296
  • [6] NEW PRECISION TECHNIQUE FOR MEASURING CONCENTRATION VERSUS DEPTH OF HYDROGEN IN SOLIDS
    LANFORD, WA
    TRAUTVETTER, HP
    ZIEGLER, JF
    KELLER, J
    [J]. APPLIED PHYSICS LETTERS, 1976, 28 (09) : 566 - 568
  • [7] DOPING, SCHOTTKY-BARRIER AND P-N-JUNCTION FORMATION IN AMORPHOUS-GERMANIUM AND SILICON BY RF SPUTTERING
    PAUL, W
    LEWIS, AJ
    CONNELL, GAN
    MOUSTAKAS, TD
    [J]. SOLID STATE COMMUNICATIONS, 1976, 20 (10) : 969 - 972
  • [8] SUBSTITUTIONAL DOPING OF AMORPHOUS SILICON
    SPEAR, WE
    LECOMBER, PG
    [J]. SOLID STATE COMMUNICATIONS, 1975, 17 (09) : 1193 - 1196
  • [9] ELECTRONIC PROPERTIES OF SUBSTITUTED DOPED AMORPHOUS SI AND GE
    SPEAR, WE
    LECOMBER, PG
    [J]. PHILOSOPHICAL MAGAZINE, 1976, 33 (06): : 935 - 949
  • [10] [No title captured]