WHITE-LIGHT PHASE-STEPPING INTERFEROMETRY FOR SURFACE PROFILING

被引：67

作者：

HARIHARAN, P

ROY, M

机构：

[1] Physical Optics Department, School of Physics, University of Sydney, New South Wales

来源：

JOURNAL OF MODERN OPTICS | 1994年 / 41卷 / 11期

关键词：

D O I：

10.1080/09500349414552041

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Interferometric profilers suffer from phase ambiguities if the measurement range involves a change in the optical path difference greater than a wavelength. This limitation has been overcome by using white light and scanning the object in height. We show how an achromatic phase shifter operating on the geometric phase can be used to evaluate the fringe contrast directly and to locate the position of the zero-order white-light fringe along the scanning axis.

引用

页码：2197 / 2201

页数：5

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