EFFICIENCY OF A CAPACITOR-TRANSFER-TYPE DISCHARGE EXCIMER LASER WITH AUTOMATIC PREIONIZATION

被引：32

作者：

MIYAZAKI, K

HASAMA, T

YAMADA, K

FUKATSU, T

EURA, T

SATO, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 08期

关键词：

D O I：

10.1063/1.337102

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：2721 / 2728

页数：8

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