INSITU X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF GAAS GROWN BY ATOMIC LAYER EPITAXY

被引:52
作者
KODAMA, K
OZEKI, M
MOCHIZUKI, K
OHTSUKA, N
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D O I
10.1063/1.100909
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O59 [应用物理学];
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页码:656 / 657
页数:2
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共 9 条
  • [1] ATOMIC LAYER EPITAXY OF III-V BINARY COMPOUNDS
    BEDAIR, SM
    TISCHLER, MA
    KATSUYAMA, T
    ELMASRY, NA
    [J]. APPLIED PHYSICS LETTERS, 1985, 47 (01) : 51 - 53
  • [2] GAAS/ALGAAS QUANTUM-WELL LASERS WITH ACTIVE REGIONS GROWN BY ATOMIC LAYER EPITAXY
    DENBAARS, SP
    BEYLER, CA
    HARIZ, A
    DAPKUS, PD
    [J]. APPLIED PHYSICS LETTERS, 1987, 51 (19) : 1530 - 1532
  • [3] DOI A, 1986, APPL PHYS LETT, V49, P785, DOI 10.1063/1.97546
  • [4] MOLECULAR LAYER EPITAXY
    NISHIZAWA, J
    ABE, H
    KURABAYASHI, T
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (05) : 1197 - 1200
  • [5] MECHANISM OF SURFACE-REACTION IN GAAS LAYER GROWTH
    NISHIZAWA, J
    KURABAYASHI, T
    ABE, H
    NOZOE, A
    [J]. SURFACE SCIENCE, 1987, 185 (1-2) : 249 - 268
  • [6] NEW APPROACH TO THE ATOMIC LAYER EPITAXY OF GAAS USING A FAST GAS-STREAM
    OZEKI, M
    MOCHIZUKI, K
    OHTSUKA, N
    KODAMA, K
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (16) : 1509 - 1511
  • [7] Pauling L., 1960, NATURE CHEM BOND
  • [8] SUNTOLA T, 1984, 16TH C SOL STAT DEV, P647
  • [9] GAAS ATOMIC LAYER EPITAXY BY HYDRIDE VPE
    USUI, A
    SUNAKAWA, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (03): : L212 - L214