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METHOD FOR AZIMUTHAL ALIGNMENT IN ELLIPSOMETRY

被引：12
作者：
STEEL, MR
机构：
来源：
APPLIED OPTICS | 1971年 / 10卷 / 10期
关键词：
D O I：
10.1364/AO.10.002370
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
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页码：2370 / &
相关论文
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[4]   A MODIFIED METHOD FOR CALIBRATING ANALYSER AND POLARIZER IN AN ELLIPSOMETER [J].
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[6]   MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].
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