MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY

被引：612

作者：

MCCRACKIN, FL

PASSAGLIA, E

STROMBERG, RR

STEINBERG, HL

机构：

来源：

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY | 1963年 / A 67卷 / 04期

关键词：

D O I：

10.6028/jres.067A.040

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：363 / +

页数：1

共 24 条

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