EFFECT OF OXYGEN IMPURITIES ON NITRIDATION OF HIGH-PURITY SILICON

被引:22
作者
MESSIER, DR [1 ]
WONG, P [1 ]
INGRAM, AE [1 ]
机构
[1] USA,MAT & MECH RES CTR,WATERTOWN,MA 02172
关键词
D O I
10.1111/j.1151-2916.1973.tb15436.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:171 / 172
页数:2
相关论文
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    EVANS, JW
    CHATTERJI, SK
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