KINETICS OF THE OXIDATION AND NITRIDATION OF SILICON AT HIGH TEMPERATURES

[1] THE OXIDATION OF SILICON AT HIGH TEMPERATURES [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1951, 73 (07) : 3497 - 3499

[2] ELECTRICAL CONDUCTIVITY OF FUSED QUARTZ [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (07) : 795 - 800

[3] Collins J.F.., 1955, J MET, V7, P612, DOI DOI 10.1007/BF03377548

[4] GEIL GW, 1942, J RES NBS, V28, P593

[5] THE HIGH TEMPERATURE OXIDATION OF SILICON [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1957, 61 (09) : 1200 - 1205

[6] NASINI AG, 1934, 9 C INT QUIM PUR APL, V3, P280

[1] THE OXIDATION OF SILICON AT HIGH TEMPERATURES [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1951, 73 (07) : 3497 - 3499

[2] ELECTRICAL CONDUCTIVITY OF FUSED QUARTZ [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (07) : 795 - 800

[3] Collins J.F.., 1955, J MET, V7, P612, DOI DOI 10.1007/BF03377548

[4] GEIL GW, 1942, J RES NBS, V28, P593

[5] THE HIGH TEMPERATURE OXIDATION OF SILICON [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1957, 61 (09) : 1200 - 1205

[6] NASINI AG, 1934, 9 C INT QUIM PUR APL, V3, P280