PREPARATION AND PROPERTIES OF (PB,LA)TIO3 PYROELECTRIC THIN-FILMS BY RF-MAGNETRON SPUTTERING

被引：40

作者：

NAGAO, N

TAKEUCHI, T

IIJIMA, K

机构：

[1] Environmental Technology Research Laboratory, Matsushita Electric Industrial Co. Ltd, Moriguchi, OSK

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期

关键词：

PLT; THIN FILM; RF-MAGNETRON SPUTTERING; IR SENSOR; PYROELECTRIC COEFFICIENT;

D O I：

10.1143/JJAP.32.4065

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The c-axis-oriented Pb0.85La0.15Ti0.96O3 (PLT) thin films appropriate for the infrared sensor utilized in environmental monitoring were successfully obtained by rf-magnetron sputtering. The effects of sputtering conditions on the thin film growth were studied. Highly c-axis-oriented films were prepared under the most suitable sputtering conditions. Those films showed extremely large pyroelectric coefficient of 1.3 x 10(-7) C/cm2 K and relatively small dielectric constant of 350 (1 kHz) at room temperature. Dielectric and ferroelectric properties of the film were also reported.

引用

页码：4065 / 4068

页数：4

共 8 条

[1]

Heartling G. H., 1971, J AM CERAM SOC, V54, P1

[2] PREPARATION OF C-AXIS ORIENTED PBTIO3 THIN-FILMS AND THEIR CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES [J].