DYNAMIC THEORY OF DIFFRACTION AT IN-DEPTH MULTILAYERED GRATINGS

被引：23

作者：

PARDO, B

ANDRE, JM

SAMMAR, A

机构：

[1] UNIV PARIS 06,F-75230 PARIS 05,FRANCE

[2] UNIV PARIS 06,CNRS,UA 176,CHIM PHYS LAB,F-75231 PARIS 05,FRANCE

来源：

JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE | 1991年 / 22卷 / 03期

关键词：

DIFFRACTION GRATING; X-RAY OPTICS;

D O I：

10.1088/0150-536X/22/3/005

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The diffraction of an electromagnetic plane wave at an in-depth multilayered grating is considered in the framework of dynamical theory. The grating consists of a stack of slabs whose dielectric constants vary laterally in a periodic manner. All the slabs are homogeneous in-depth and have the same lateral periodicity. The two polarization cases (TE and TM modes) are treated. Numerical results are given in the X-ray regime for lamellar gratings obtained by engraving multilayer Bragg mirrors.

引用

页码：141 / 148

页数：8

共 10 条

[1]

Abeles F, 1950, ANN PHYSIQUE, V5, P596

[2]

[Anonymous], 1886, ACTA MATH-DJURSHOLM, DOI [DOI 10.1007/BF02417081, 10.1007/BF02417081]

[3]

ATTWOOD DT, 1965, AIP C P, V75

[4] SOFT-X-RAY MULTILAYER GRATINGS WITH SUBHALFMICRON PERIOD [J].