HIGH-RESOLUTION ELECTRON-BEAM LITHOGRAPHY AND EVALUATION OF 1ST-ORDER DISTRIBUTED FEEDBACK LASERS

被引：9

作者：

KORN, M

KLINGENSTEIN, M

GERMANN, R

FORCHEL, A

NICKEL, H

SCHLAPP, W

LOSCH, R

STREUBEL, K

SCHOLZ, F

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584648

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2057 / 2061

页数：5

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