HIGH-RESOLUTION ELECTRON-BEAM LITHOGRAPHY AND EVALUATION OF 1ST-ORDER DISTRIBUTED FEEDBACK LASERS

被引:9
作者
KORN, M
KLINGENSTEIN, M
GERMANN, R
FORCHEL, A
NICKEL, H
SCHLAPP, W
LOSCH, R
STREUBEL, K
SCHOLZ, F
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期
关键词
D O I
10.1116/1.584648
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:2057 / 2061
页数:5
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