TECHNOLOGICAL-DEVELOPMENT OF SOFT-X-RAY MIRROR IN THE ADVANCED MATERIAL PROCESSING AND MACHINING TECHNOLOGY RESEARCH ASSOCIATION (AMMTRA)

被引：5

作者：

KATAOKA, I

机构：

[1] Central Research Laboratory, Japan Aviation Electronics Industry, Ltd., Akishima-shi, Tokyo, 196

来源：

SURFACE & COATINGS TECHNOLOGY | 1992年 / 51卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(92)90251-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Recent technological developments of soft X-ray optics in AMMTRA (Advanced Material Processing and Machining Technology Research Association) are reviewed. In this review, the ultraprecision grinding technology and the hypersmooth surface polishing technology are introduced. The fabrication of high-quality multilayers for soft X-ray reflectors using DIBS (dual ion beam sputtering) and DIBD (direct ion beam deposition) are reviewed. The TEM transmission electron micrographs of several kinds of multilayers are shown, and also a quantitative evaluation of the amorphous structure and an analysis of roughness in the spacial wavelength for deposited films are introduced.

引用

页码：273 / 282

页数：10