Fabrication of an electrostatic wobble micromotor using deep-etch UV lithography, nickel electroforming and a titanium sacrificial layer

被引：11

作者：

Daniau, W

Ballandras, S

Kubat, L

Hardin, J

Martin, G

Basrour, S

机构：

[1] Institut des Microtechniques, Franche-Comté, Besangon, 25044

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1995年 / 5卷 / 04期

关键词：

D O I：

10.1088/0960-1317/5/4/002

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new electrostatic micromotor structure is presented in this paper. The actuation principle is based on the wobbling effect due to the use of direct electrostatic forces. A theoretical evaluation of the principal characteristics of the motor is presented. The motor is designed to present a low rotation speed (some 10 rotations per minute) suitable for direct actuation without speed reduction. The microfabrication technology used to realize the motor is based on deep-etch UV lithography, a nickel electroformed rotor and a titanium sacrificial layer. The flow chart of the technological steps implemented is detailed. First experimental results and improvements of the motor are discussed.

引用

页码：270 / 275

页数：6

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