ESTIMATION OF SPUTTERING RATE BY BOMBARDMENT WITH ARGON GAS IONS

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 257 - 278

[2] Kittel C., 1971, INTRO SOLID STATE PH

[3] EJECTION OF ATOMIC PARTICLES FROM ION BOMBARDED SOLIDS [J]. ADVANCES IN PHYSICS, 1970, 19 (80) : 457 - &

[4] MARTYNEN.YV, 1965, FIZ TVERD TELA+, V6, P1581

[5] AN INVESTIGATION OF THERMAL SPIKES BY STUDYING HIGH ENERGY SPUTTERING OF METALS AT ELEVATED TEMPERATURES [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (110): : 291 - &

[6] SPUTTERING OF COPPER BY BOMBARDMENT WITH IONS OF 5-25 KEV [J]. PHYSICA, 1960, 26 (11): : 1000 - 1008

[7] THEORETICAL ASPECTS OF CATHODE SPUTTERING IN THE ENERGY RANGE OF 5-25 KEV [J]. PHYSICA, 1960, 26 (11): : 1009 - 1011

[8] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J]. PHYSICAL REVIEW, 1969, 184 (02): : 383 - +

[9] ENERGY SPECTRUM OF EJECTED ATOMS DURING HIGH ENERGY SPUTTERING OF GOLD [J]. PHILOSOPHICAL MAGAZINE, 1968, 18 (152): : 377 - &

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 257 - 278

[2] Kittel C., 1971, INTRO SOLID STATE PH

[3] EJECTION OF ATOMIC PARTICLES FROM ION BOMBARDED SOLIDS [J]. ADVANCES IN PHYSICS, 1970, 19 (80) : 457 - &

[4] MARTYNEN.YV, 1965, FIZ TVERD TELA+, V6, P1581

[5] AN INVESTIGATION OF THERMAL SPIKES BY STUDYING HIGH ENERGY SPUTTERING OF METALS AT ELEVATED TEMPERATURES [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (110): : 291 - &

[6] SPUTTERING OF COPPER BY BOMBARDMENT WITH IONS OF 5-25 KEV [J]. PHYSICA, 1960, 26 (11): : 1000 - 1008

[7] THEORETICAL ASPECTS OF CATHODE SPUTTERING IN THE ENERGY RANGE OF 5-25 KEV [J]. PHYSICA, 1960, 26 (11): : 1009 - 1011

[8] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J]. PHYSICAL REVIEW, 1969, 184 (02): : 383 - +

[9] ENERGY SPECTRUM OF EJECTED ATOMS DURING HIGH ENERGY SPUTTERING OF GOLD [J]. PHILOSOPHICAL MAGAZINE, 1968, 18 (152): : 377 - &