RIE ETCHING OF DEEP BRAGG GRATING FILTERS IN GAINASP-INP

被引:12
作者
CREMER, C
SCHIENLE, M
机构
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D O I
10.1049/el:19890789
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1177 / 1178
页数:2
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