THE FASTEST REAL-TIME SPECTROSCOPIC ELLIPSOMETRY - APPLICATIONS AND LIMITATIONS FOR IN-SITU AND QUALITY-CONTROL

The principle and limitations of real time spectroscopic ellipsometry (RTSE) are demonstrated. Several applications show the capability and accuracy of the instrument. The spectral range covers 260-1060 nm with 1024 pixels. The fastest spectra can be recorded at a rate of 40 spectra per second in groups of eight and with 128 spectral steps. The reproducibility of 10(-3) is better than the accuracy by a factor of three. These features make RTSE an appropriate measurement tool for process control of diffusion and epitaxial growth processes as well as etching or cleaning.