PREPARATION AND PROPERTIES OF COEVAPORATED AMORPHOUS CO-ZR THIN-FILMS

被引：27

作者：

KRISHNAN, R ^{[1
]}

TARHOUNI, M ^{[1
]}

TESSIER, M ^{[1
]}

GANGULEE, A ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 03期

关键词：

D O I：

10.1063/1.330787

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：2243 / 2245

页数：3

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