COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS

被引：677

作者：

DIRKS, AG

LEAMY, HJ

机构：

来源：

THIN SOLID FILMS | 1977年 / 47卷 / 03期

关键词：

D O I：

10.1016/0040-6090(77)90037-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：219 / 233

页数：15

共 55 条

[1]

ALLEN JA, 1959, STRUCTURE PROPERTIES, P46

[2]

BARNA A, 1974, AMORPHOUS LIQUID SEM, P109

[3]

BARNA A, 1976, STRUCTURE EXCITATION, P199

[4] SERIALLY DEPOSITED AMORPHOUS AGGREGATES OF HARD SPHERES [J].

BENNETT, CH .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) :2727-&

[5]

BERRY RW, 1968, THIN FILM TECHNOLOGY, P229

[6]

BINDELL JB, 1974, THIN SOLID FILMS, V23, P31, DOI 10.1016/0040-6090(74)90215-6

[7] EVAPORATED FILM PROFILES OVER STEPS IN SUBSTRATES [J].

BLECH, IA .

THIN SOLID FILMS, 1970, 6 (02) :113-&

[8] ANISOTROPIC MICROSTRUCTURE IN EVAPORATED AMORPHOUS GERMANIUM FILMS [J].

CARGILL, GS .

PHYSICAL REVIEW LETTERS, 1972, 28 (21) :1372-&

[9] OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM FILMS [J].

DONOVAN, TM ;

SPICER, WE ;

BENNETT, JM ;

ASHLEY, EJ .

PHYSICAL REVIEW B, 1970, 2 (02) :397-&

[10] HIGH-RESOLUTION ELECTRON MICROSCOPE OBSERVATION OF VOIDS IN AMORPHOUS GE [J].

DONOVAN, TM ;

HEINEMAN.K .

PHYSICAL REVIEW LETTERS, 1971, 27 (26) :1794-&

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