METAL PATTERN DEPOSITION BY LASER-INDUCED FORWARD TRANSFER

被引:28
作者
KANTOR, Z
TOTH, Z
SZORENYI, T
机构
[1] Research Group on Laser Physics, the Hungarian Academy of Sciences, H-6720 Szeged
基金
匈牙利科学研究基金会;
关键词
D O I
10.1016/0169-4332(94)00384-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Results of a systematic study on laser-induced transfer of metal patterns are summarized. The pulse width of the lasers used in the experiments was scaled from a few nanoseconds to one millisecond to discover the different time-dependent processes determining ablation and transfer of thin films of a variety of metals. The physical events were followed by optical and electron microscopy and static and time-resolved optical measurements, as well as ultrafast photography. The main conclusion is that the adhesive properties of the interface between the metal film and the support, and the thermophysical characteristics of both the support and target substrates determine the yield of the transfer. Optimum parameter sets ensuring deposition of well adhering micrometer-sized patterns faithfully reproducing the illuminating area were determined. The technological importance of this novel technique is pointed out.
引用
收藏
页码:196 / 201
页数:6
相关论文
共 11 条
[1]  
BASEMAN RJ, 1988, P MRS, V101, P237
[2]   LASER-INDUCED FORWARD TRANSFER - THE EFFECT OF SUPPORT-FILM INTERFACE AND FILM-TO-SUBSTRATE DISTANCE ON TRANSFER [J].
KANTOR, Z ;
TOTH, Z ;
SZORENYI, T .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 54 (02) :170-175
[3]  
KANTOR Z, 1994, IN PRESS APPL PHYS L, V64
[4]   PULSED LASER ABLATIVE DEPOSITION OF THIN METAL-FILMS [J].
MOGYOROSI, P ;
SZORENYI, T ;
BALI, K ;
TOTH, Z ;
HEVESI, I .
APPLIED SURFACE SCIENCE, 1989, 36 (1-4) :157-163
[5]  
SZORENYI T, 1994, P SOC PHOTO-OPT INS, V2045, P126, DOI 10.1117/12.167550
[6]  
TOTH Z, 1990, P SOC PHOTO-OPT INS, V1279, P150, DOI 10.1117/12.20631
[7]   TIME-RESOLVED REFLECTIVITY AND TRANSMISSION MEASUREMENTS DURING LASER-INDUCED BLOW-OFF OF THIN METAL-FILMS [J].
TOTH, Z ;
SOLIS, J ;
AFONSO, CN ;
VEGA, F ;
SZORENYI, T .
APPLIED SURFACE SCIENCE, 1993, 69 (1-4) :330-334
[8]   AR+ LASER-INDUCED FORWARD TRANSFER (LIFT) - A NOVEL METHOD FOR MICROMETER-SIZE SURFACE PATTERNING [J].
TOTH, Z ;
SZORENYI, T ;
TOTH, AL .
APPLIED SURFACE SCIENCE, 1993, 69 (1-4) :317-320
[9]   PULSED LASER PROCESSING OF GE/SE THIN-FILM STRUCTURES [J].
TOTH, Z ;
SZORENYI, T .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1991, 52 (04) :273-279
[10]  
TOTH Z, COMMUNICATION