INSITU DISTORTION MEASUREMENT OF AN ION PROJECTOR WITH 5X ION-OPTICAL REDUCTION

被引:12
作者
STENGL, G [1 ]
BOSCH, G [1 ]
CHALUPKA, A [1 ]
FEGERL, J [1 ]
FISCHER, R [1 ]
LAMMER, G [1 ]
LOSCHNER, H [1 ]
MALEK, L [1 ]
NOWAK, R [1 ]
TRAHER, C [1 ]
WOLF, P [1 ]
VONACH, H [1 ]
机构
[1] UNIV VIENNA,INST NUCL PHYS,A-1010 VIENNA,AUSTRIA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 06期
关键词
D O I
10.1116/1.585969
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In situ distortion measurements of an ion projector with 5X ion-optical reduction were performed. At optimum conditions the measured minimum distortion was less than 0.15 mum within an exposure field of 8 mmX8 mm. This result is in excellent agreement with fifth order ion-optical calculations.
引用
收藏
页码:2838 / 2841
页数:4
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