THE DEPOSITION OF THIN-FILMS OF MATERIALS WITH HIGH MELTING-POINTS ON SUBSTRATES AT ROOM-TEMPERATURE USING THE PULSE PLASMA METHOD

被引：50

作者：

SOKOLOWSKI, M

SOKOLOWSKA, A

MICHALSKI, A

ROMANOWSKI, Z

RUSEKMAZUREK, A

WRONIKOWSKI, M

机构：

来源：

THIN SOLID FILMS | 1981年 / 80卷 / 1-3期

关键词：

Compendex;

D O I：

10.1016/0040-6090(81)90230-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SEMICONDUCTOR DIODES, LIGHT EMITTING

引用

收藏

页码：249 / 254

页数：6

相关论文

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[8] MECHANICAL-PROPERTIES OF HARD CARBON-FILMS
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