THEORY OF CHARGE STATES IN SPUTTERING

被引：63

作者：

SROUBEK, Z ^{[1
]}

机构：

[1] SONDERFORSCH 126,GOTTINGEN,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 194卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(82)90577-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：533 / 539

页数：7

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