MONOLITHICALLY INTEGRATED WAVE-GUIDE MSM DETECTOR HEMT AMPLIFIER RECEIVER FOR LONG-WAVELENGTH LIGHTWAVE SYSTEMS

We report the first demonstration of a long-wavelength receiver that monolithically integrates an InGaAsP waveguide, an InAIAs-InGaAs metal-semiconductor-metal detector and an InAIAs-In-GaAs HEMT amplifier. An external responsivity in response to guided signals of 0.43 and 0.5 A/W was recorded, respectively, for a 150 and 300-mu-m long detector integrated with an InGaAsP waveguide. This corresponds to internal quantum efficiency of about 95% after taking account of the combined external loss such as insertion loss between waveguide and fiber and propagation loss in the waveguide. A pulse response of 200 ps, corresponding to about 820 MHz bandwidth, was measured at the output of the HEMT amplifier. The receiver represents a major advance towards achieving high performance integrated receiving components for long-wavelength lightwave systems.