THE SI(111)-PD INTERFACE - SPECTROSCOPIC EVIDENCE OF CHEMICAL PROCESSES AT LIQUID-NITROGEN TEMPERATURE

被引：24

作者：

ABBATI, I ^{[1
]}

BRAICOVICH, L ^{[1
]}

DEMICHELIS, B ^{[1
]}

PENNINO, UD ^{[1
]}

机构：

[1] UNIV MODENA,IST FIS,I-41100 MODENA,ITALY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 06期

关键词：

Compendex;

D O I：

10.1116/1.570659

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

SEMICONDUCTING SILICON

引用

页码：1303 / 1305

页数：3

共 11 条

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SU, CY
SPICER, WE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (05): : 930 - 935
[2] ABBATI I, SOLID STATE COMMUN
[3] ABBATI I, 1980, ELECTROCHEM SOC, V80, P130
[4] ABBATI I, 1979, NOV C PHYS SEM SURF
[5] ABBATI I, 1980, 15TH C PHYS SEM KYOT
[6] BRAICOVICH I, 1980, J VAC SCI TECHNOL, V17, P1005
[7] CHYE PW, 1978, PHYSICAL REV B, V17, P2882
[8] MICROSCOPIC COMPOUND FORMATION AT THE PD-SI(111) INTERFACE
FREEOUF, JL
RUBLOFF, GW
HO, PS
KUAN, TS
[J]. PHYSICAL REVIEW LETTERS, 1979, 43 (24) : 1836 - 1839
[9] CHEMICAL AND STRUCTURAL-PROPERTIES OF THE PD-SI INTERFACE DURING THE INITIAL-STAGES OF SILICIDE FORMATION
HO, PS
TAN, TY
LEWIS, JE
RUBLOFF, GW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05): : 1120 - 1124
[10] OELHAFEN P, 1979, SOLID STATE COMMUN, V30, P641, DOI 10.1016/0038-1098(79)90113-3