VOLTAGE MEASUREMENT IN SCANNING ELECTRON MICROSCOPE

被引:36
作者
WELLS, OC
BREMER, CG
机构
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1968年 / 1卷 / 09期
关键词
D O I
10.1088/0022-3735/1/9/302
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:902 / &
相关论文
共 23 条
[1]   ELECTRON GUN USING LONG-LIFE LANTHANUM HEXABORIDE CATHODE [J].
BROERS, AN .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (04) :1991-&
[2]   CORRECTION [J].
BROERS, AN .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (07) :3040-&
[3]   ELECTRON BEAM INDUCED POTENTIAL CONTRAST ON UNBIASED PLANAR TRANSISTORS [J].
CHANG, THP ;
NIXON, WC .
SOLID-STATE ELECTRONICS, 1967, 10 (07) :701-&
[4]   SCANNING ELECTRON MICROSCOPES - IS HIGH RESOLUTION POSSIBLE [J].
CREWE, AV .
SCIENCE, 1966, 154 (3750) :729-&
[5]   EVALUATION OF PASSIVATED INTEGRATED CIRCUITS USING THE SCANNING ELECTRON MICROSCOPE [J].
EVERHART, TE ;
WELLS, OC ;
MATTA, RK .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (08) :929-936
[6]  
GREEN D, 1966, 8 P ANN EL LAS BEAM, P375
[7]   ELECTRON BEAM SCANNING TECHNIQUE FOR MEASURING SURFACE WORK FUNCTION VARIATIONS [J].
HAAS, GA ;
THOMAS, RE .
SURFACE SCIENCE, 1966, 4 (01) :64-&
[8]  
Hachenberg O., 1959, ADVAN ELECTRON ELECT, V11, P413
[9]   COMPARISON OF SPHERICAL DEFLECTOR AND CYLINDRICAL MIRROR ANALYZERS [J].
HAFNER, H ;
SIMPSON, JA ;
KUYATT, CE .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (01) :33-&
[10]   ANALYSIS OF MATERIALS BY ELECTRON-EXCITED AUGER ELECTRONS [J].
HARRIS, LA .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (03) :1419-&