EVALUATION OF PASSIVATED INTEGRATED CIRCUITS USING THE SCANNING ELECTRON MICROSCOPE

被引：76

作者：

EVERHART, TE

WELLS, OC

MATTA, RK

机构：

来源：

关键词：

D O I：

10.1149/1.2426295

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：929 / 936

页数：8

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EVERHART TE, 1958, 4TH P INT C EL MICR, P269

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