GRAIN-BOUNDARY AND INTERDIFFUSION STUDIES IN COMPOUND SEMICONDUCTOR THIN-FILMS AND DEVICES UTILIZING AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROSCOPY

被引：25

作者：

KAZMERSKI, LL

机构：

[1] Photovoltaics Branch, Solar Energy Research Institute, Golden, CO 80401

来源：

THIN SOLID FILMS | 1979年 / 57卷 / 01期

关键词：

D O I：

10.1016/0040-6090(79)90413-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Interdiffusion problems in polycrystalline thin films and thin film heterojunctions were investigated. Depth-composition profiling using Auger electron spectroscopy and secondary ion mass spectroscopy was employed to determine both the grain boundary diffusion and the interdiffusion coefficients in thin films and devices involving CdS, CuInS2 and CuInSe2. Specifically, the temperature dependences of the diffusion coefficients of cadmium from CdS and from elemental films into the copper ternaries were experimentally determined. The effects of these diffusion processes on thin film device stability are discussed. © 1979.

引用

页码：99 / 106

页数：8

共 15 条

[1] SIMS ANALYSIS OF DEUTERIUM DIFFUSION IN HYDROGENATED AMORPHOUS SILICON
CARLSON, DE
MAGEE, CW
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (01) : 81 - 83
[2] INTERDIFFUSION AND SCHOTTKY-BARRIER-HEIGHT VARIATIONS IN AU-W(TI)-N-GAAS CONTACTS
DAY, HM
CHRISTOU, A
MACPHERSON, AC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (04): : 939 - 942
[3] AUGER DEPTH PROFILING OF AU-ALXGA1-XAS INTERFACES AND LPE ALXGA1-XAS-GAAS HETEROJUNCTIONS
GARNER, CM
SHEN, YD
KIM, JS
PEARSON, GL
SPICER, WE
HARRIS, JS
EDWALL, DD
SAHAI, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (04): : 985 - 988
[4] Gupta D., 1978, Thin films. Interdiffusion and reactions, P161
[5] FORMALISM FOR DETERMINING GRAIN-BOUNDARY DIFFUSION-COEFFICIENTS USING SURFACE ANALYSIS
HALL, PM
MORABITO, JM
[J]. SURFACE SCIENCE, 1976, 59 (02) : 624 - 630
[6] FORMALISM FOR EXTRACTING DIFFUSION-COEFFICIENTS FROM CONCENTRATION PROFILES
HALL, PM
MORABITO, JM
[J]. SURFACE SCIENCE, 1976, 54 (01) : 79 - 90
[7] Kazmerski L.L., 1977, TERNARY COMPOUNDS 19, V35, P217
[8] ELECTRON AND X-RAY-DIFFRACTION ANALYSES OF TERNARY COMPOUND (I-III-VI2) THIN-FILMS
KAZMERSKI, LL
AYYAGARI, MS
SANBORN, GA
WHITE, FR
MERRILL, AJ
[J]. THIN SOLID FILMS, 1976, 37 (03) : 323 - 334
[9] AUGER ANALYSIS OF CDS-CUINSE2 THIN-FILM SOLAR-CELLS
KAZMERSKI, LL
COOPER, RB
WHITE, FR
MERRILL, AJ
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (04) : 496 - 498
[10] KIM HB, 1976, GALLIUM ARSENIDE R A, V33, P145

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