NEUTRAL AND ION-BEAM SIMS OF NONCONDUCTING MATERIALS

被引:26
作者
VANDENBERG, JA [1 ]
机构
[1] UNIV MANCHESTER,INST SCI & TECHNOL,DEPT CHEM,MANCHESTER M60 1QD,LANCS,ENGLAND
关键词
D O I
10.1016/0042-207X(86)90152-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:981 / 989
页数:9
相关论文
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  • [1] Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145
  • [2] FAST ATOM BOMBARDMENT OF SOLIDS AS AN ION-SOURCE IN MASS-SPECTROMETRY
    BARBER, M
    BORDOLI, RS
    SEDGWICK, RD
    TYLER, AN
    [J]. NATURE, 1981, 293 (5830) : 270 - 275
  • [3] BARBER M, 1982, ANAL CHEM, V54, pA645
  • [4] BARBER M, 1981, J CHEM SOC CHEM COMM, V325
  • [5] BENTZ BL, 1983, ANAL CHEM, V55, P1443
  • [6] Betz G., 1983, SPUTTERING PARTICLE, P11
  • [7] LOCAL IN-DEPTH ANALYSIS OF CERAMIC MATERIALS BY NEUTRAL BEAM SECONDARY ION MASS-SPECTROMETRY
    BORCHARDT, G
    SCHERRER, H
    WEBER, S
    SCHERRER, S
    [J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1980, 34 (3-4): : 361 - 373
  • [8] BORCHARDT G, 1981, MIKROCHIM ACTA, V2, P421
  • [9] ANALYSIS OF POLYMER SURFACES BY SIMS .1. AN INVESTIGATION OF PRACTICAL PROBLEMS
    BRIGGS, D
    WOOTTON, AB
    [J]. SURFACE AND INTERFACE ANALYSIS, 1982, 4 (03) : 109 - 115
  • [10] ANALYSIS OF POLYMER SURFACES BY SIMS .4. A STUDY OF SOME ACRYLIC HOMO-POLYMERS AND CO-POLYMERS
    BRIGGS, D
    HEARN, MJ
    RATNER, BD
    [J]. SURFACE AND INTERFACE ANALYSIS, 1984, 6 (04) : 184 - 192