HIGH-TC (95-K) AS-GROWN SUPERCONDUCTING BI-SR-CA-CU-O THIN-FILMS

被引:29
作者
OHBAYASHI, K [1 ]
ANMA, M [1 ]
TAKAI, Y [1 ]
HAYAKAWA, H [1 ]
机构
[1] NAGOYA UNIV, FAC ENGN, DEPT ELECT ENGN, CHIKUSA KU, NAGOYA, AICHI 464, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 11期
关键词
As-grown; Bi-Sr-Ca-Cu-O; Buffer layer; High-Tc-phase; Multitarget; Sputtering; Thin film;
D O I
10.1143/JJAP.29.L2049
中图分类号
O59 [应用物理学];
学科分类号
摘要
As-grown superconducting thin films of the Bi-Sr-Ca-Cu-O system were prepared on MgO(lOO) substrates by a three-target rf magnetron sputtering system with a regulated shuttering technique. Using this system, Bi-Sr-Ca-Cu-O superconducting high-T-phase films (700 A) with a thin Bi-Sr-Cu-O semiconductor-like-phase buffer layer (70 A) were deposited on MgO (100) substrates under rigorous control of the film composition at 760°C. The superconducting transition temperature of the as-grown film was 115 K (TCoJ and 95 K (rC/ero). The surface of this film was very smooth and uniform. © 1990 IOP Publishing Ltd.
引用
收藏
页码:L2049 / L2052
页数:4
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