FORMATION OF AS-GROWN BISRCACUO THIN-FILMS BY SPUTTERING 3 TARGETS HEAVILY DOPED WITH PB IN ATMOSPHERES OF O-2 AND N2O/O2 MIXTURES

被引：12

作者：

KURODA, K ^{[1
]}

KOJIMA, K ^{[1
]}

TANIOKU, M ^{[1
]}

YOKOYAMA, K ^{[1
]}

KUROKI, H ^{[1
]}

HAMANAKA, K ^{[1
]}

机构：

[1] MITSUBISHI ELECTR CO,MAT & ELECTR DEVICE LAB,AMAGASAKI,HYOGO 661,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 06期

关键词：

As-grown superconductivity; Bi(Pb)SrCaCuO; Multitargets; N[!sub]2[!/sub]0 gas; Sputtering; Superconductor; Thin films;

D O I：

10.1143/JJAP.29.1066

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

As-grown BiSrCaCuO thin films have been formed on MgO(100) substrates at various temperatures by RF magnetron sputtering from three targets in atmospheres of neat O2 and N2O/O2 mixtures (1:1). The three targets had slightly different compositions heavily doped with Pb: Bi3Pb3Sr2Ca2Cu3Ox, Bi2Pb2Sr3Ca3Cu3Ox and Bi2Pb2Sr2Ca2Cu4.5Ox. Both films formed in O2 and N2O/O2 mixtures at 660°C showed zero resistivity at 77–78 K. A film obtained at 540°C by N2O/O2 mixtures showed superconductivity, while a film obtained at the same substrate temperature by neat O2 did not. Gas mixtures of N2O and O2 used instead of neat O2 as a sputtering gas were effective in lowering the growth temperature by 20–40 degrees. © 1990 The Japan Society of Applied Physics.

引用

页码：1066 / 1069

页数：4

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